PMS

PMS 2018-05-11T17:39:29+00:00

PMS(Powder Moving System)

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-Product Overview
PMS (Powder Moving System)

Prevents powder coalescence by shooting out nitrogen gas
PMS can solve clogging issue when byproducts are formed during the semiconductor and
FPD process by shooting out hot N2 into exhaust lines.

Specifications

Item Description 특징
Model PMS * PMS can solve clogging issue when byproducts are formed during semiconductor,,LCD and OLED manufacturing process

*Reduce powder sedimentation of Fore line and Exhaust line

*Possible to shoot out hot N2 with proper pressure and targeted flowrate

*Suppressing oxide formation inside the pipe

*Reduction of maintenance costs and maximization of equipment efficiency.

*Applicable to pipes and equipment (PUMP, SCRUBBER) which located in narrow spaces

Main Function Hot N2 high-pressure injection
Material SUS 304 / 316
In / Out-Let NW 40/40, NW 40/50, NW 50/50 or etc.
Utility Use N2
Pressure 3~5kg/cm2
Flow 30 ~ 200LPM
Connect 1/4 or 3/8
Heater Capacity 500W or 800W
Temperature 150 ℃ ± α
Power Supply 208 ~ 230V A.C 1Phase 50/60 Hz
Control Type PID
Communication RS232 or RS485

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PMS MODULE

PMS MODULE-L TYPE

CONTROLLER

CONTROLLER