EPD(Exhaust Pressure Detector)
-Product Overview-
EPD (Exhaust Pressure Detector)
Real-time monitoring of exhaust pressure about the phenomenon of exhaust line clogging
EPD system can monitor clogging issues in pipe lines and predict PM. In addition, it can prevent and pre-sense physical losses,
such as Gas leakages, Vacuum pump trip (occurrence of wafer accident and repair cost), etc.
Specifications
| Item | Description | Feature | |
|---|---|---|---|
| Model | EPD | *Real-time pressure sensing inside the Exhaust lines
* Solve clogging issue when byproducts are formed during the semiconductor and FPD process in exhaust lines. *Alarm setting function *Reduces powder sedimentation in Fore and Exhaust lines *Possible to shoot out hot N2 with proper pressure and targeted flowrate. * Suppressing oxide formation inside the pipe * Reduction of maintenance costs and maximization of equipment efficiency. * Applicable to pipes and equipment (PUMP, SCRUBBER) which are located in narrow space |
|
| Main Function | Hot N2 high-pressure injection and pipe pressure monitoring | ||
| Material | SUS 304 / 316 | ||
| In / Out-Let | NW 40/40, NW 40/50, NW 50/50 or etc. | ||
| Utility | Use | N2 | |
| Pressure | 3~5kg/cm2 | ||
| Flow | 30 ~ 200LPM | ||
| Connect | 1/4” or 3/8” | ||
| Heater Capacity | 500W or 800W | ||
| Temperature | 150 ℃ ± α | ||
| Power Supply | 208 ~ 230V A.C 1Phase 50/60 Hz | ||
| Control Type | PID | ||
| Communication | RS232 or RS485 | ||
| Option | Input storage: 8GB (about a year) | ||
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EPD Monitoring DATA
EPD MODULE
EPD CONTROLLER
EPD-200