EPD (Exhaust Line Pressure Detector)

EPD Function

  • Exhaust Line Pressure Monitoring : With real-time monitoring of exhaust line pressure, process issues arising from pressure rise can be prevented.
  • Neutralization : Process gas dilution using hot N2
  • Transportation : Hot N2 injected into pipe wall quickly moves the by-product to prevent accumulation within the pipe
  • Heat energy activation : Hot N2 injection prevents the by-product from accumulating within the pipe

Merits of EPD

  • Check the pressure on vulnerable parts with pressure detection (pipe connection parts and bellows)
  • Effective management with real-time monitoring and interlock function based on FDC connection
  • Prevent the generation and accumulation of powder
  • Suppress oxide generation within the pipe
  • Improve facility productivity by reducing the PM interval
  • Reduction in maintenance cost

PMS Specification

Item Description
Power Single Phase 208 ~ 230 VAC. 50/60Hz
Operation Temp. Max. 200℃
N2 Flow Rate Max. 200 SLM
N2 Pressure Source 5.0 kg/cm2 ↑
Communication RS-485 Modbus Type
Sealing Material None
Material STS 316